In semiconductor manufacturing and solid-state physics, a charged particle is typically an electron, a proton, or an ion that carries a positive or negative electric charge. These particles are the fundamental carriers of current in electronic devices. Engineers manipulate their trajectories using electric and magnetic fields in processes like ion implantation, electron beam lithography, and mass spectrometry.
We need to calibrate the magnetic lenses to ensure the charged particle beam focuses exactly on the resist layer.
Related terms
Vacuum tube
An evacuated glass or metal envelope containing electrodes used to control electron flow.
Space charge
A localized accumulation of excess electrical charge in a specific region of a device.
Polarization charge
The bound charge that accumulates in a dielectric material when exposed to an electric field.