Defect density

nounStandard termStatistics

Number of yield-killing defects per unit area of wafer or panel, the main input to yield models.

Defect density, often written D0, counts killer defects per square centimeter. The simple Poisson yield model predicts die yield as e to the power of minus die area times D0: a 1 square centimeter die at a D0 of 0.1 yields about 90 percent, and at 0.5 only about 61 percent. Real defects cluster, so the Murphy model or a negative binomial model with a clustering factor fits large die better and predicts higher yield than plain Poisson.

Heard on the job

D0 came down from 0.25 to 0.12 after the filter change. On a 1 square centimeter die that's about eleven points of yield.

Also heard as

  • D0
  • D-naught
  • defects per square centimeter