Cryopump

nounStandard termVacuum

Capture pump that freezes and adsorbs gas onto surfaces cooled to about 10 to 20 K by a closed-cycle refrigerator.

A pump that stores gas rather than exhausting it, using a two-stage helium refrigerator (the cold head) driven by a compressor. The first stage at about 50 to 80 K condenses water, the second stage at 10 to 20 K freezes nitrogen, oxygen and argon, and activated charcoal on the second stage adsorbs hydrogen, helium and neon. It gives very high water speed and a clean, oil-free vacuum, but it fills up and has to be regenerated.

Heard on the job

Cryo's second stage is reading 18 K and climbing, she's full, schedule a regen tonight.

Insider tip

A cryopump releases everything it holds when it warms, which is why it carries a relief valve; never block the regen exhaust path.

Also heard as

  • cryo
  • cryogenic pump