Cold cathode gauge

nounStandard termVacuum

Ionization gauge with no filament that uses a magnetically trapped discharge to read high vacuum pressure.

An ionization gauge in which a high voltage and a permanent magnet sustain a Penning or inverted magnetron discharge, whose current tracks pressure from about 10⁻² down to 10⁻⁹ mbar or lower. With no hot filament it survives venting and dirty processes, which is why it is common on production tools. At very low pressure the discharge can be slow to ignite, and contamination of the electrodes shifts the calibration.

Heard on the job

Cold cathode on the analysis chamber can take minutes to strike down in the E-10s, don't panic when it reads nothing at first.

Also heard as

  • Penning gauge
  • inverted magnetron gauge
  • IMG
  • CCG