Pirani gauge

nounStandard termVacuum

Thermal conductivity gauge that reads pressure from how quickly gas carries heat away from a hot wire.

A gauge with a heated filament forming one arm of a bridge circuit; the power needed to hold the wire at constant temperature depends on how much heat the gas conducts away, which depends on pressure in the medium vacuum range. Useful readings run from about 10⁻³ mbar up to some tens of mbar, extended to atmosphere in convection-enhanced versions. The reading depends on gas type because each gas conducts heat differently, so the gauge is calibrated for nitrogen or air.

Heard on the job

Pirani says 2E-2 on the foreline, that's fine for the turbo, leave it alone.

Insider tip

The thermocouple gauge, or TC gauge, common on US furnaces and coaters, works on the same principle with a cruder readout, so it shares the same blind spots on helium and argon.

Also heard as

  • Pirani
  • thermal conductivity gauge